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Microsystem Technology and Microrobotics

What is the approximate size scale in microsystem technology? Why is it reasonable to believe that microsystem products would be available at lower costs than products of larger, more conventional size? What is a hybrid microsensor? What are some of the basic types of microsystem devices? Name some products that represent microsystem technology.


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Why is silicon a desirable work material in micro- system technology? What is meant by the term aspect ratio in micro- system technology?

What is the difference between bulk micromachin- ing and surface micromachining? What are the three steps in the LIGA process?


  • ISBN 13: 9783642082320.
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  • Microsystem technology and microrobotics by s fatikow u rembold.
  • Micro/Nano robotics | EPFL.
  • Fundamentals of Microfabrication. Manufacturing Techniques for Micro- fabrication and Nanotechnology.

    Implications of Emerging Micro- and Nanotechnologies. Define microelectromechanical system. What is the approximate size scale in microsystem technology? Why is it reasonable to believe that microsystem products would be available at lower costs than products of larger, more conventional size? What is a hybrid microsensor?

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    What are some of the basic types of microsystem devices? Name some products that represent microsystem technology. Courses for new students Interdisciplinary teaching units Other faculty courses. Within the last few years, microrobotics and microsystem technology MST have become a focus of interest to industry and evolved into an important field with great application potential.


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    It plays a decisive role for industry to be competitive in many areas such as medicine, production engineering, biotechnology, environmental technology, automotive products, etc. Despite of the growing interest in this new technology, there is hardly any book or lecture course that treats microrobotics and MST in a coherent and comprehensive way.

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    It discusses all important aspects of this rapidly expanding technology, its diversity of products and fields of application. The course contains an overview of numerous ideas of new devices and the problems of manufacturing them.